Production of Ti-Mg-Si Thin Films by Magnetron Sputtering and Their Phase Transformations with Temperature

Abstract:

• Periodical: Key Engineering Materials (Volumes 230-232)
• Pages: 64-67
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.230-232.64
• Online since: October 2002
• Authors: Bruno Trindade, C. Coelho, G. Tomé, F.H. Froes
• Keywords: Light Alloys, Sputtering, Structural Characterisation, Ti-Mg-Si

References

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