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Optical Properties of Heavily Aluminum-Doped Zinc Oxide Thin Films Prepared by Molecular Beam Epitaxy

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Electroceramics in Japan VI

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Periodical:

Key Engineering Materials (Volume 248)

Pages:

91-94

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.248.91

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Online since:

August 2003

Authors:

Takeshi Ohgaki, Yuji Kawamura, Takashi Kuroda, Naoki Ohashi, Yutaka Adachi, Takaaki Tsurumi, Fujio Minami, Hajime Haneda

Keywords:

Aluminum (Al), Molecular Beam Epitaxy, Optical Property, Thin Film, Zinc Oxide (ZnO)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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DOI: 10.1143/jjap.40.250

[3] N. Ohashi, T. Sekiguchi, K. Aoyama, T. Ohgaki, Y. Terada, I. Sakaguchi, T. Tsurumi and H. Haneda, J. Appl. Phys., 91 (2002), p.3658.

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[4] K. Iwata, P. Fons, A. Yamada, K. Matsubara and S. Niki, J. Cryst. Growth., 209 (2000), p.526.

[5] A. P. Roth, J. B. Webb and D. F. Williams, Solid State Commun., 39 (1981), p.1269. e-mail: OHGAKI. Takeshi@nims. go. jp Fax: 0298-55-1196 Fig. 4 Absorption spectra of ZO and AZO films at 5 K.