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HomeKey Engineering MaterialsKey Engineering Materials Vol. 253Growth Behavior of Epitaxial MgO Films on Si(001)...

Growth Behavior of Epitaxial MgO Films on Si(001) by Pulsed Laser Deposition

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Ceramic Interfaces: Properties and Applications V

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Periodical:

Key Engineering Materials (Volume 253)

Pages:

119-128

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.253.119

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Online since:

November 2003

Authors:

Tomoaki Yamada, Naoki Wakiya, Kazuo Shinozaki, Nobuyasu Mizutani

Keywords:

Epitaxial Growth, MgO, PLD, RHEED, Silicon

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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