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HomeKey Engineering MaterialsKey Engineering Materials Vols. 257-258Development of Ultra Thin Quartz by Abrasive...

Development of Ultra Thin Quartz by Abrasive Machining

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Advances in Abrasive Technology VI

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Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

123-128

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.123

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Online since:

February 2004

Authors:

Mutsumi Touge, Junji Watanabe, Y. Ohbuchi, Hidetoshi Sakamoto, N. Ueda

Keywords:

Lapping, Polishing, Quartz, Ultra-Thinning Process

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] S. Sato: J. of Japan Society for Abrasive Technology, Vol. 41 (1997), p.127.

[2] R.A. Heising: Electric Industries Association, 1978, p.1.

[3] F.P. Bowden and R.D. Tabor: The Friction and lubrication of Solid (1950).