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HomeKey Engineering MaterialsKey Engineering Materials Vols. 257-258Characteristics of the Fine Grained CVD Diamond...

Characteristics of the Fine Grained CVD Diamond Film and its Industrial Applications

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Advances in Abrasive Technology VI

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Periodical:

Key Engineering Materials (Volumes 257-258)

Pages:

553-558

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.257-258.553

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Online since:

February 2004

Authors:

K. Kazahaya, A. Yamakawa, T. Fukunishi

Keywords:

Fine Grained Diamond Films, Tool for Semiconductor Package Processing

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] Y. Matsumoto, S. Kawai, K. Tomari and K. Kazahaya: A.L.M.T. Technical Review, 2001, p.27.

[2] A.K. Gangopadhyay, P.A. Willermet, M.A. Tamor and W.C. Vassell: Tribology International, Vol. 30 (1997), p.9.

[3] S. Ri, H. Yoshida and H. Watanabe et al: The 10 th International Symposium on Advanced Materials.

[4] Y. Murakami and H. Hanyu: Journal of the Japan Society for Abrasive Technology, Vol. 46 (2002), p.14. (a) (b) (c) (d) Fine-grained diamond Cemented carbide alloy 1mm 1mm 1mm 1mm