Study on the Surface Quality of LiNbO3 Wafer by CMP

Tong Xing; Ju Long Yuan; W. Li; Shi Ming Ji; L.B. Zhang; Wen Hong Zhao

doi:10.4028/www.scientific.net/KEM.259-260.644

Paper Titles

Comparative Study on the Magnetic-Abrading and the Electrolytic-Magnetic-Abrading Processes
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Research on Magnetic Abrasive Finishing for the Free Form Surface of Mould by 5-DOF Parallel Virtual Axis Machine Tool
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Development and Investigation of Ferromagnetic Magneto Material in Magnetic Lapping Technology
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Research on the Cutting Principle of New Non-Conventional Technology —— Efficiency Ultrasonic Honing
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Study on the Surface Quality of LiNbO₃ Wafer by CMP
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Present Situation and Developing Trend of Abrasive Air Jet Micromachining
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Study on Magnetorheological Surface Finishing
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The Technology of Finishing Process of Die Space Based upon Magnetic Abrasive Finishing
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Surface Roughness of Optical Glass Under Magnetorheological Finishing
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 259-260Study on the Surface Quality of LiNbO3 Wafer by...

Study on the Surface Quality of LiNbO₃ Wafer by CMP

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Key Engineering Materials (Volumes 259-260)

Pages:

644-647

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.259-260.644

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Online since:

March 2004

Authors:

Tong Xing, Ju Long Yuan, W. Li, Shi Ming Ji, L.B. Zhang, Wen Hong Zhao

Keywords:

Chemical Mechanical Polishing (CMP), Lithium Niobate (LiNbO₃), Ultra Smooth Surface

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