Study on the Surface Quality of LiNbO3 Wafer by CMP

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Periodical:

Key Engineering Materials (Volumes 259-260)

Edited by:

Xipeng Xu

Pages:

644-647

Citation:

T. Xing et al., "Study on the Surface Quality of LiNbO3 Wafer by CMP ", Key Engineering Materials, Vols. 259-260, pp. 644-647, 2004

Online since:

March 2004

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