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HomeKey Engineering MaterialsKey Engineering Materials Vols. 264-268The Sol-Gel Process for Realisation of Optical...

The Sol-Gel Process for Realisation of Optical Micro-Structures in Glass

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Euro Ceramics VIII

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Periodical:

Key Engineering Materials (Volumes 264-268)

Pages:

371-374

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.264-268.371

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Online since:

May 2004

Authors:

V.K. Parashar, A. Sayah, M.A.M. Gijs

Keywords:

Diffractive Optical Elements, Micro-Fabrication, Micro-Lens, Sol-Gel (SG)

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] X. Li, T. Abe and M. Eshashi : Sens & Act. A. 87 (2001), p.139.

[2] C. David, J. Wei, T. Lippert and A. Wokaun : Microelec. Eng. 57-58 (2001), p.453.

[3] M.T. Gale : Microelect. Eng. 34 (1997), p.321.

[4] A. Sayah, V.K. Parashar and M.A.M. Gijs : Proceed. IEEE-MEMS 2002 Conference, Las Vegas, USA, January 20 - 24, 2002, p.516.

[5] V.K. Parashar, A. Sayah, M. Pfeffer, F. Schoch, J. Gobrecht and M.A.M. Gijs : Proceed. MNE-02 Conference, Lugano, Switzerland, Sept. 16-19, 2002, p.250.