Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition

Abstract:

• Periodical: Key Engineering Materials (Volumes 264-268)
• Pages: 459-464
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.264-268.459
• Online since: May 2004
• Authors: Y. Otani, Soichiro Okamura, Tadashi Shiosaki
• Keywords: 6-Inch Si, Liquid Delivery, MOCVD, PbPt_x, PZT, Thin Film

References

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