Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition

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Key Engineering Materials (Volumes 264-268)

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Edited by:

Hasan Mandal and Lütfi Öveçoglu

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459-464

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Y. Otani et al., "Formation of PZT Thin Films on 6-Inch Wafers by Liquid Delivery Metalorganic Chemical Vapor Deposition ", Key Engineering Materials, Vols. 264-268, pp. 459-464, 2004

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May 2004

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