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HomeKey Engineering MaterialsKey Engineering Materials Vol. 269Formation and Characteristics of Ferroelectric...

Formation and Characteristics of Ferroelectric Film on Non-Planar Substrate with Spray Coating Method

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Electroceramics in Japan VII

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Periodical:

Key Engineering Materials (Volume 269)

Pages:

113-116

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.269.113

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Online since:

August 2004

Authors:

Masaaki Ichiki, Lulu Zhang, Zhen Yang, Tsuyoshi Ikehara, Ryutaro Maeda

Keywords:

Ferroelectric Property, Micro-Electromechanical System (MEMS), Perovskite Structure, PZT, Spray Coating Method

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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