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HomeKey Engineering MaterialsKey Engineering Materials Vol. 269Thermoelectric Hydrogen Sensor Based on SiGe Thin...

Thermoelectric Hydrogen Sensor Based on SiGe Thin Film

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Electroceramics in Japan VII

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Periodical:

Key Engineering Materials (Volume 269)

Pages:

117-120

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.269.117

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Online since:

August 2004

Authors:

Kazuki Tajima, Fabin Qiu, Woosuck Shin, Naoya Sawaguchi, Noriya Izu, Ichiro Matsubara, Norimitsu Murayama

Keywords:

Crystallization, Hydrogen Sensor, RF Sputtering, Silicon-Germanium (SiGe), Thermoelectric Property, Thin Film

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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