Study on Gas Sensing Properties of WO3 Thin Films

Abstract:

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Tungsten oxide thin films were prepared by an inorganic-sol-gel dip-coating process, where the sol was obtained by adding citric acid, as chelating agent, to the ammonia solution of tungstic acid. The resultant thin films were a mixture of monoclinic and tetragonal phases of WO3 and, after being pretreated at 600°C and sintered at 650°C, the average grain size of the polycrystalline films was about 500 nm. The gas-sensing properties of WO3 thin films were tested at temperatures ranging from 500° to 600°C and in nitrogen gas containing 5vol% O2 or 5vol% H2. The WO3 sensors exhibited a good sensitivity and response speed at the temperature of 550°C.

Info:

Periodical:

Key Engineering Materials (Volumes 280-283)

Edited by:

Wei Pan, Jianghong Gong, Chang-Chun Ge and Jing-Feng Li

Pages:

319-322

DOI:

10.4028/www.scientific.net/KEM.280-283.319

Citation:

M. Jiang et al., "Study on Gas Sensing Properties of WO3 Thin Films", Key Engineering Materials, Vols. 280-283, pp. 319-322, 2005

Online since:

February 2007

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$35.00

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