Preparation and CO2 Gas Sensitive Properties of CuO-SrTiO3-Based Semiconductor Thin Films

Yan Fei Gu; Hui Ming Ji; Bin Zhang; Ting Xian Xu

doi:10.4028/www.scientific.net/KEM.280-283.311

Paper Titles

Ag Nanoparticle Enhanced Photocatalytic Activity of Rutile TiO₂ Films Prepared by Electrostatic Self-Assembly Method
p.293

The Role of Niobium in (Ca, Si, Ce, Nb)-Doped TiO₂ Varistors
p.297

Effect of La₂O₃ and CeO₂ on Nb₂O₅ Doped TiO₂ Ceramic Varistors
p.301

Study on the Gas Sensitivity of a CeO₂ Based Ceramic Sensing Element: Structure and Characteristic
p.305

Preparation and CO₂ Gas Sensitive Properties of CuO-SrTiO₃-Based Semiconductor Thin Films
p.311

Oxygen Sensitivity of SrFeO_3-δ Thin Films Prepared by Sol-Gel Method
p.315

Study on Gas Sensing Properties of WO₃ Thin Films
p.319

A Potentiometric SO₂ Gas Sensor with Solid Reference Electrode
p.323

Effect of Iron Oxide on the Structure, Electrical and Magnetic Properties of (70% mole V₂O₅- (15-x)% mole P₂O₅-15% mole B₂O₃) Semi Conducting Glass System
p.327

HomeKey Engineering MaterialsKey Engineering Materials Vols. 280-283Preparation and CO2 Gas Sensitive Properties of...

Preparation and CO₂ Gas Sensitive Properties of CuO-SrTiO₃-Based Semiconductor Thin Films

Abstract:

CuO-SrTiO3-based thin films were prepared by novel sol-gel technology on Al2O3 substrates using Cu(NO3)2, SrCl2 and TiCl4 as the starting materials, critic acid and ethylene glycol as chelating agents. CO2 sensing properties of the films were investigated. Structure characteristics of the sol and asgrown thin films were analyzed by FT-IR spectrum, X-ray diffraction and SEM. The results reveal that the films consisted of CuO phase and SrTiO3 phase have nanocrystalline microstructure at 750°C for 40 min. The modified CuO-SrTiO3 thin films exhibit good resistance-temperature and gas sensitivity properties in a wide range of temperature. The films exposed to 6% CO2 show that sensitivity are 32, and response and recover time are within 2 s at 250 °C operating temperature.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 280-283)

Pages:

311-314

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.280-283.311

Citation:

Cite this paper

Online since:

February 2007

Authors:

Yan Fei Gu, Hui Ming Ji, Bin Zhang, Ting Xian Xu

Keywords:

Carbon Dioxide CO₂, CuO-SrTiO₃, Sensitivity, Thin Film

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Y. Sadaoka, Y. Sakai and T. Manabe: Sensor and Actuators B Vol. 15-16 (1993), p.166.

Google Scholar

[2] T. Maruyama, S. Sakai and Y. Saito: Solid State Ionics Vol. 23 (1984), p.107.

Google Scholar

[3] H. Hadano, T. Suzuki and H. Futata: Chemical Sensors Vol. 1 (1994), p.476.

Google Scholar

[4] A. Dubbe, H. D. Wiembofer, Y. Sadaoka and W. Gopel: Chemical Sensors Vol. 2 (1994), p.779.

Google Scholar

[5] S. Matsubara, S. Kaneko, S. Morimoto, S. Shimizu, T. Ishihara and Y. Takita: Sensors and Actuators B Vol. 65 (2000), p.128.

Google Scholar

[6] Th. Lang, M. Caron, R. Izquierdo, D. Ivanov, J.F. Currie and A. Yelon: Sensors and Actuators B Vol. 31 (1996), p.9.

Google Scholar

[7] T. Ishihara, K. Shiokawa, K, Eguchi and H. Arai: Sens. Actuators Vol. 19 (1989), p.259.

Google Scholar

[8] T. Ishihara, K. Kometani, Y. Mizuhara and Y. Takita: J. Am. Ceram. Soc. Vol. 75 (1992), p.613.

Google Scholar

[9] F.H. Chen, H.S. Koo and T.Y. Tseng: J. Am. Ceram. Soc. Vol. 75 (1992), p.96. 0 20 40 60 80 100 0 1000 2000 3000 4000 5000 6000 air in 6% CO2 gas in Resistance / ¦¸ time / s Fig. 6 CO2 gas sensitive character of CuO-SrMg0. 05Ti0. 95O3-Ag thin film.

Google Scholar