ELID Grinding Properties of High-Strength Reaction-Sintered SiC

Abstract:

The high-strength reaction-sintered silicon carbide (RS-SiC) developed by TOSHIBA is one of the most excellent materials for large-scale space-borne optics. The bending strength of the high-strength RS-SiC is two times higher than other SiC ceramics. The purpose of this study is to investigate the ELID grinding properties of the high strength RS-SiC. Two types of metal bond diamond wheels (cup type and straight type) were used to grinding tests. The ground surface properties, such as roughness, subsurface damage and micro-step were made clear by measurement or observation. It was confirmed that, both the surface roughness and the depth of micro-step produced by cup-wheel were lower than those produced by straight-wheel. When a #20000 grit sized cup-wheel was used, a considerably high quality mirror surface (Ra<0.8nm) can be achived.

• Periodical: Key Engineering Materials (Volumes 291-292)
• Pages: 121-126
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.291-292.121
• Online since: August 2005
• Authors: Y. Dai, Hitoshi Ohmori, Wei Min Lin, H. Eto, N. Ebizuka, K. Tsuno
• Keywords: Ceramic, ELID (ELectrolytic In-Process Dressing) Grinding, High Strength Reaction-Sintered SiC, Mirror Surface, Subsurface Damage

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