ELID Grinding Properties of High-Strength Reaction-Sintered SiC
The high-strength reaction-sintered silicon carbide (RS-SiC) developed by TOSHIBA is one of the most excellent materials for large-scale space-borne optics. The bending strength of the high-strength RS-SiC is two times higher than other SiC ceramics. The purpose of this study is to investigate the ELID grinding properties of the high strength RS-SiC. Two types of metal bond diamond wheels (cup type and straight type) were used to grinding tests. The ground surface properties, such as roughness, subsurface damage and micro-step were made clear by measurement or observation. It was confirmed that, both the surface roughness and the depth of micro-step produced by cup-wheel were lower than those produced by straight-wheel. When a #20000 grit sized cup-wheel was used, a considerably high quality mirror surface (Ra<0.8nm) can be achived.
Yury M. Baron, Jun'ichi Tamaki and Tsunemoto Kuriyagawa
Y. Dai et al., "ELID Grinding Properties of High-Strength Reaction-Sintered SiC", Key Engineering Materials, Vols. 291-292, pp. 121-126, 2005