New Compensation Grinding of Axisymmetric Aspherical Lenses with High NA Value

Nobuhito Yoshihara; Tsunemoto Kuriyagawa

doi:10.4028/www.scientific.net/KEM.291-292.51

Paper Titles

Effects of TiH₂ on the Properties of Fe-Based Diamond Composites
p.27

Effect of Ultrasonic Elliptic Vibration on Friction between Shoe and Workpiece in Ultrasonic Elliptic-Vibration Shoe Centerless Grinding
p.33

Eco- and Energy-Efficient Grinding Processes
p.39

Study on Ultrasonic Vibration Grinding Character of Nano ZrO₂ Ceramics
p.45

New Compensation Grinding of Axisymmetric Aspherical Lenses with High NA Value
p.51

A New Diamond Wheel Containing Boron Doped Diamond Abrasives Enabling Electrically Conductive Cutting Edge and High Thermal Stability
p.57

Attempt of Electrodischarge Grinding with an Electrically Conductive Diamond-Cutting-Edge Wheel
p.63

Ultra-High Speed Grinding Using a CBN Wheel for a Mirror-Like Surface Finish
p.67

Ultraprecision Fabrication of Large-Scale SiC Spherical Mirror Using ELID Grinding Process
p.73

HomeKey Engineering MaterialsKey Engineering Materials Vols. 291-292New Compensation Grinding of Axisymmetric...

New Compensation Grinding of Axisymmetric Aspherical Lenses with High NA Value

Abstract:

Aspherical parts are installed in various optical instruments. At present, a higher form accuracy is required for aspherical parts to improve the resolution of the optical instruments. To meet this demand, an arc envelope grinding method has been developed. In the arc envelope grinding process, a spherical shaped grinding wheel is used and the form error of the cross-sectional profile of the grinding wheel is transcribed to the workpiece profile. Therefore, the grinding wheel should be trued previously. However, the form error of the grinding wheel cannot be removed perfectly. To reduce the affect of the form error of the grinding wheel, compensation grinding must be carried out. In this work, the wheel path of a new compensation grinding method is proposed for a high NA value of the workpiece. Tests using the new compensation grinding method demonstrate the reduction in the form error of aspherical parts.