Ultraprecision Fabrication of Large-Scale SiC Spherical Mirror Using ELID Grinding Process

Y. Dai; Hitoshi Ohmori; Wei Min Lin; H. Eto; N. Ebizuka

doi:10.4028/www.scientific.net/KEM.291-292.73

Paper Titles

New Compensation Grinding of Axisymmetric Aspherical Lenses with High NA Value
p.51

A New Diamond Wheel Containing Boron Doped Diamond Abrasives Enabling Electrically Conductive Cutting Edge and High Thermal Stability
p.57

Attempt of Electrodischarge Grinding with an Electrically Conductive Diamond-Cutting-Edge Wheel
p.63

Ultra-High Speed Grinding Using a CBN Wheel for a Mirror-Like Surface Finish
p.67

Ultraprecision Fabrication of Large-Scale SiC Spherical Mirror Using ELID Grinding Process
p.73

Studies on CCD On-Line Measurement System for Grinding Wheel Wear
p.81

Wear of Metal-Bonded Diamond Tools in Different Abrasive Processes
p.85

Signal Analysis of Acoustic Emission for Laser Imitating Grinding Burn
p.91

Analysis of Grinding Temperature Considering Surface Generation Mechanism
p.97

HomeKey Engineering MaterialsKey Engineering Materials Vols. 291-292Ultraprecision Fabrication of Large-Scale SiC...

Ultraprecision Fabrication of Large-Scale SiC Spherical Mirror Using ELID Grinding Process

Abstract:

Lightweight mirrors of SiC (Silicon Carbide) are currently used for numerous space telescopes. The most favorable characteristics of the material are high specific stiffness, high thermal conductivity and low thermal expansion (CTE). For large-scale SiC mirrors, however, the machining cost is very high using traditional polishing process. In this study, a large-scale SiC spherical mirror (φ360mm) was designed as reducing-weight structure with many open-back triangular cells. The ELID mirror grinding technique was conducted to finish the mirror. A unique jig composed of many hydrostatic actuators was developed for reducing the deformation resulted from the grinding force. By using an on-machine measurement system, the form error of the finished surface was measured. The surface roughness of the mirror was also examined with a mobile AFM. As result, a high quality mirror surface, which has form accuracy 0.8µm P-V and roughness of Ra 7.8nm, was achieved. This paper presents the experimental procedure and results.

You might also be interested in these eBooks

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 291-292)

Pages:

73-80

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.291-292.73

Citation:

Cite this paper

Online since:

August 2005

Authors:

Y. Dai, Hitoshi Ohmori, Wei Min Lin, H. Eto, N. Ebizuka

Keywords:

ELID (ELectrolytic In-Process Dressing) Grinding, Hydrostatic Jig, Large-Scale Spherical Mirror, On-Machine Measurement (OMM), Sintered SiC, Space Telescope

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] J. Breysse, D. Castel, B. Laviron, D. Logut and M. Bougoin: Proc. of ICSO, France, Mar. (2004).

DOI: 10.1117/12.2552134

Google Scholar

[2] T. Onaka, Y. Sugiyama and S. Miura: Proc. of SPIE, 1998, 3354, pp.900-903.

Google Scholar

[3] H. Ohmori and T. Nakagawa: Annals of the CIRP, Vol. 39 (1990), No. 1, pp.320-323.

Google Scholar

[4] H. Ohmori: International Journal of JSPE, Vol. 26 (1992), No. 4, pp.273-276.

Google Scholar

[5] H. Ohmori and T. Nakagawa: Annals of the CIRP, Vol. 44 (1995), No. 1, pp.287-290.

Google Scholar

[6] Y. Dai, H. Ohmori, Y. Watanabe, H. Eto, W. Lin and T. SUZUKI: JSME International Journal, Vol. 47 (2004), No. 1, pp.66-71.

Google Scholar

[7] Y. Dai, H. Ohmori, H. Eto, Y. Watanabe, W. Lin and T. SUZUKI, A. Makinouchi: Journal of the Japan Society for Abrasive Technology, Vol. 47 (2003), No. 9, pp.512-516. (in Japanese).

Google Scholar

[8] H. Ohmori, Y. Dai, W. Lin, T. SUZUKI, K. Katahira, N. Itoh and A. Makinouchi: Key Engineering Materials, Vols. 238-239 (2003), pp.65-70.

DOI: 10.4028/www.scientific.net/kem.238-239.65

Google Scholar