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HomeKey Engineering MaterialsKey Engineering Materials Vols. 297-300Fabrication and Characterization of Capacitive...

Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducer

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Advances in Fracture and Strength

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Periodical:

Key Engineering Materials (Volumes 297-300)

Pages:

2225-2232

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.297-300.2225

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Online since:

November 2005

Authors:

Ki Bok Kim, Bong Young Ahn, Hae Won Park, Young Joo Kim

Keywords:

Capacitive Micromachined Ultrasonic Transducer cMUT, Micro-Electromechanical System (MEMS), NDE, Non-Contact

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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