Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducer

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Periodical:

Key Engineering Materials (Volumes 297-300)

Edited by:

Young-Jin Kim, Dong-Ho Bae and Yun-Jae Kim

Pages:

2225-2232

DOI:

10.4028/www.scientific.net/KEM.297-300.2225

Citation:

K. B. Kim et al., "Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducer", Key Engineering Materials, Vols. 297-300, pp. 2225-2232, 2005

Online since:

November 2005

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$35.00

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