Chatter marks that limit ground surface finish have been observed in accurate grinding by using optical curve grinder. To reveal the mechanism of chatter marks, the relationships between grinding parameters and chatter marks are experimentally studied. The profile of the ground surface is analyzed through microscope as well as FFT method. It is found the dynamic characteristics of grinder and the vibration test are efficient tools for this study. Modeling of grinding chatter marks is proved effective for the result of simulation showing consistent with that of experiments. The results of study point out the way to eliminate chatter marks and establish the basis for detection and prediction of the marks.