The Effects of Nitrogen and Annealing on the Electrical Property of the Diamond-Like Carbon (DLC) Films

Bong Geun Choi; Jae Kwang Kim; Won Jae Yang; Koichi Niihara; Jong Won Yoon; Kwang Bo Shim

doi:10.4028/www.scientific.net/KEM.317-318.589

Paper Titles

Development of Silicon Carbide Coating on Al₂O₃ Ceramics from Precursor Polymers by Radiation Curing
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Accelerated Degradation Test of Indium Tin Oxide (ITO) Thin Films Deposited by RF Magnetron Sputter
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Local Acceleration Effects of Adatom at the Vicinity on the Surface: Case of Co Nano Thin-Films on Al Surface
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Laser-Assisted Synthesis of Amorphous/Pseudoamorphous GaN Thin Films and Nanostructures
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The Effects of Nitrogen and Annealing on the Electrical Property of the Diamond-Like Carbon (DLC) Films
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The Anisotropic Properties of the Tape Cast Si₃N₄ Ceramics with Rod-Like β-Si₃N₄ Seeds Addition
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Fabrication and Characterization of Zirconia-Based New Ceramic Composites for Thermal Barrier Coatings
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Design and Characterization of Porosity Gradient for the Laminated Alumina Tubes
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Alumina-Based Nanocomposites Fabricated by a Novel Soaking Method
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The Effects of Nitrogen and Annealing on the Electrical Property of the Diamond-Like Carbon (DLC) Films

Abstract:

The nitrogenated diamond-like carbon films (a-C:H:N) were deposited on Si-wafer by the rf-PECVD method with the addition of nitrogen to the mixture gas of methane and hydrogen. We were investigating the effect of the additive nitrogen gases and annealing in relationship between bonding structure and electrical properties of the deposited films. The electrical conductivity of films increased with the flow rate of nitrogen increasing up to 10 sccm. Also as annealing temperature was increased, the electrical conductivity of films increased. The structure analysis results show that an increase of the flow rate of nitrogen and annealing temperature favor the formation of sp2 bonding in the films. Therefore, we confirmed that the increase of the electrical conductivity is due to structure change by graphitization of the films.