High-speed machining (HSM) is very useful method as one of the most effective manufacturing processes because it has excellent quality and dimensional accuracy for precision machining. Recently micromachining technologies of various functional materials with very thin walls are needed in the field of electronics, mobile telecommunication and semiconductors. However, HSM is not suitable for microscale thin-walled structures because of the lack of their structure stiffness to resist high-speed cutting force. A microscale thin wall machined by HSM shows the characteristics of the impact behavior because the high-speed cutting force works very shortly on the machined surface. We propose impact analysis model in order to predict the limit thickness of a very thin-wall and investigate its limit thickness of thin-wall manufactured by HSM using finite element method. Also, in order to verify the usefulness of this method, we will compare finite element analyses with experimental results and demonstrate some applications.