Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

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Periodical:

Edited by:

Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki

Pages:

255-260

DOI:

10.4028/www.scientific.net/KEM.329.255

Citation:

S. H. Yin et al., "Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror", Key Engineering Materials, Vol. 329, pp. 255-260, 2007

Online since:

January 2007

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$35.00

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