Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

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Dongming Guo, Tsunemoto Kuriyagawa, Jun Wang and Jun’ichi Tamaki

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255-260

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S. H. Yin et al., "Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror", Key Engineering Materials, Vol. 329, pp. 255-260, 2007

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January 2007

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DOI: https://doi.org/10.1117/12.215617

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