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HomeKey Engineering MaterialsKey Engineering Materials Vol. 329Development of Nano-Precision SynerGistic...

Development of Nano-Precision SynerGistic Finishing Process of ELID-Grinding and MRF for Silicon Mirror

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Advances in Abrasive Technology IX

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Periodical:

Key Engineering Materials (Volume 329)

Pages:

255-260

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.329.255

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Online since:

January 2007

Authors:

Shao Hui Yin, Hitoshi Ohmori, Wei Min Lin, Yoshihiro Uehara

Keywords:

ELID (ELectrolytic In-Process Dressing) Grinding, Form Accuracy, Magnetorheological Finishing (MRF), Silicon Mirror, Surface Roughness (SR), Ultra-Precision Synergistic Finishing Process

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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[1] H. Ohmori and T. Nakagawa: Annals of the CIRP, Vol.39(1990), No.1, pp.329-332.

[2] H. Ohmori and T. Nakagawa: Int. Journal, JSPE, Vol.26(1992), No.4, pp.273-278.

[3] H. Ohmori and T. Nakagawa: Annals of the CIRP, Vol.44(1995), No.1, pp.287-290.

[4] S. Yin, H. Ohmori, Y. Uehara, T. Shimizu, W. Lin: Int. Journal Jpn. Soc. Mech. Eng.(JSME), S C, Vol. 47(2004), No.1, pp.59-65. Fig. 10 Form map of surface after MRF �

[5] S.D. Jacobs, D. Golini, Y. Hsu, B.E. Puchebner, D. Strafford, Wm.I. Lordonski, I.V. Prokhorov. E. Fess, D. Pietrowski, and V.W. Kordonski: SPIE 2576, (1995)pp.372-380.

DOI: 10.1117/12.215617

[6] S. Yin, H. Ohmori, W. Lin, Y. Uehara: Int. Conf. on Leading Edge Manufacturing in 21st Century (LEM21) (2005) pp.727-732.

[7] H. Ohmori, S. Yin, W. Lin, Y. Uehara: Journal of the Japan Society for Abrasive Technology (JSAT). Vol.50(2006), No.1, pp.39-44.

[8] S. Yin, H. Ohmori, W. Lin, Y. Uehara: Journal of the Japan Society for Abrasive Technology (JSAT). Vol.50(2006), in print.