High Frequency Dielectric Permittivity Measurement of Dielectric Layer of MLCC Using Non-Contact Probe
Direct observations for high frequency microscopic dielectric distributions in cross sections of a multi-layer ceramic capacitor were carried out using non-contact type microwave probe. The measured data were imaged from the raw data and rounding data process. Using microwave reflection intensity mappings from cross sections of multi-layer ceramic capacitor, the dielectric permittivity distribution in micro-region of a multi-layer ceramic capacitor was measured at room temperature. The spatial resolution was experimentally estimated to be about 10 μm from mappings of the dielectric and inner electrode layers in a multi-layer ceramic capacitor.
K. Katayama, K. Kato, T. Takenaka, M. Takata and K. Shinozaki
H. Kakemoto et al., "High Frequency Dielectric Permittivity Measurement of Dielectric Layer of MLCC Using Non-Contact Probe", Key Engineering Materials, Vol. 350, pp. 243-246, 2007