Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method
Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sol-gel method. The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic. The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200°C and the thickness is 448 nm. However, the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700°C.
Wei Pan and Jianghong Gong
C. J. Huang et al., "Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method", Key Engineering Materials, Vols. 368-372, pp. 1465-1467, 2008