Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method

Chien Jung Huang; Kuo Chien Liao; Yan Kuin Su

doi:10.4028/www.scientific.net/KEM.368-372.1465

Paper Titles

Preparation and Characterization of the Sol-Gel Derived Bioactive Glass-Fibers
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The Possibility of Glass Storage Device with Long Term Preservation and High Density Adopted Nd:YAG Laser
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Microwave Hydrothermal Synthesis of Nanosize TiO₂
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Preparation of Layered Potassium Titanate
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Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method
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Preparation of Titania Film by Pyrolysis of Chelated Tetrabutyl Titanate
p.1468

Preparation of Titania Film by Vapor Decomposition of Chelated Tetrabutyl Titanate
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Photocatalyses of Nano-Scaled ZnSe/TiO₂ and ZnS/TiO₂ Heterojunctions
p.1474

XPS Investigation on Nano-TiO₂ Modified by Titanate Coupling Agent
p.1477

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Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method

Abstract:

Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sol-gel method. The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic. The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200°C and the thickness is 448 nm. However, the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700°C.