Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method

Abstract:

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Titanium dioxide (TiO2) thin film on glass substrate is fabricated by sol-gel method. The TiO2 film is sintered at various temperatures for investigation on the refraction index and crystallization characteristic. The lower refractive index of the TiO2 thin film is 1.89 when the sintering is performed at the low temperature of 200°C and the thickness is 448 nm. However, the higher refractive index of 2.55 and chemical stability of the TiO2 film in rutile phase are obtained via sintering temperature at 700°C.

Info:

Periodical:

Key Engineering Materials (Volumes 368-372)

Edited by:

Wei Pan and Jianghong Gong

Pages:

1465-1467

DOI:

10.4028/www.scientific.net/KEM.368-372.1465

Citation:

C. J. Huang et al., "Structure Property of Titanium Dioxide Thin Films in Sintered Temperature by the Sol-Gel Method", Key Engineering Materials, Vols. 368-372, pp. 1465-1467, 2008

Online since:

February 2008

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Price:

$35.00

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