Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System

Abstract:

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The uniform distribution and the stability of the substrate temperature are the most important factors that deeply affect the quality and the growth rate of diamond films. In this paper, cemented carbide cutters were chosen for substrates, the 3D finite element (FE) model of filaments and substrates was developed in ANSYS 8.0, the calculated results show that the substrate temperature is influenced by the filament temperature, filaments diameter, the quantity of the filaments and the distance between the filaments and the substrates. The 3D finite element model of filaments and substrates also provides a basis for selecting the parameters to obtain uniform diamond films in miniature EACVD system.

Info:

Periodical:

Key Engineering Materials (Volumes 375-376)

Edited by:

Yingxue Yao, Xipeng Xu and Dunwen Zuo

Pages:

525-529

DOI:

10.4028/www.scientific.net/KEM.375-376.525

Citation:

H. X. Wang, D. W. Zuo, W. Z. Lu, F. Xu, D. Zeng, J. L. Shen, "Study on the Temperature Field of Cemented Carbide Substrate in Miniature EACVD System ", Key Engineering Materials, Vols. 375-376, pp. 525-529, 2008

Online since:

March 2008

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Price:

$35.00

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