A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator

Abstract:

Article Preview

In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

195-198

DOI:

10.4028/www.scientific.net/KEM.381-382.195

Citation:

Y. Arai et al., "A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator", Key Engineering Materials, Vols. 381-382, pp. 195-198, 2008

Online since:

June 2008

Export:

Price:

$35.00

[1] W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono and Y. Tomita: Precision Engineering, Vol. 28-3, (2004), 329-337.

[2] K. K. Tan, K. Z. Tan, H. F. Dou, S. N. Huang: Control Engineering Practice, Vol. 10, (2002), 757-772.

[3] S. Dejima, W. Gao, K. Katakura, S. Kiyono and Y. Tomita: Precision Engineering, Vol. 29-3, (2005), 329-337.

[4] C. Edwards, S. K. Spurgcon: Sliding mode control: Theory and Applications, Taylor & Francis, (1998).

[5] A. S. I. Zinober: Deterministic control of uncertain system, Peter Reregrinus Ltd. 1990. 2. 6 2. 65 2. 7 2. 75 2. 8 2. 85 2. 9 2. 95 4. 97 4. 98 4. 99.

[5] 5. 01 5. 02 5. 03 Input PID+SMO PID+DOB Time s Displacement µm 2. 6 2. 65 2. 7 2. 75 2. 8 2. 85 2. 9 2. 95 4. 97 4. 98 4. 99.

[5] 5. 01 5. 02 5. 03 Input PID+SMO PID+DOB Time s Displacement µm (b) Positioning accuracy comparison.

[2] 2. 05 2. 1 2. 15 2. 2.

[1] [2] [3] [4] [5] [6] Input PID+SMO PID+DOB Time s Displacement µm.

[2] 2. 05 2. 1 2. 15 2. 2.

[1] [2] [3] [4] [5] [6] Input PID+SMO PID+DOB Time s Displacement µm (a) Result of step response experiment.

In order to see related information, you need to Login.