A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator

Abstract:

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In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

195-198

DOI:

10.4028/www.scientific.net/KEM.381-382.195

Citation:

Y. Arai et al., "A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator", Key Engineering Materials, Vols. 381-382, pp. 195-198, 2008

Online since:

June 2008

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Price:

$35.00

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