A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator
In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Y. Arai et al., "A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator", Key Engineering Materials, Vols. 381-382, pp. 195-198, 2008