A Novel Control Method Using Nonlinear Observer for a XYθz Planar Actuator

Yoshikazu Arai; S.Y. Dian; Wei Gao

doi:10.4028/www.scientific.net/KEM.381-382.195

Paper Titles

Development of Ultra Precision Gear Measuring Instrument/UPGMI
p.179

Use of Air Beam for In-Process Optical Measurement in Precision Machining
p.183

Development and Evaluation of a Non-Contact On-Machine Profile Measurement System Using a Compact Laser Probe
p.187

Measurement Method for Micro-Cavity Based on Improved MAP Algorithm
p.191

A Novel Control Method Using Nonlinear Observer for a XYθ_z Planar Actuator
p.195

Machining Accuracy Improvement by Automatic Tool Setting and On Machine Verification
p.199

Study on the Multifunctional Bearing Test-Bed for Testing the Limit PV Performance
p.203

Online Stereo Vision Coordinate Measurement System Using on Aircraft Assembly
p.207

Laser Remote Inspection of Live Contact Wire for Railways
p.211

HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382A Novel Control Method Using Nonlinear Observer...

A Novel Control Method Using Nonlinear Observer for a XYθ_z Planar Actuator

Abstract:

In this study, a novel control law including a fine-tuned PID component to yield basic dynamic performance, and a component derived from the Sliding Mode Observer (SMO) to estimate and then compensate for modeling uncertainties and disturbances, has been introduced to planar actuator of an ultra-precision positioning stage. Experimental results are presented to verify the effectiveness of suggested dynamic compensation strategy and tracking performance of the non-contact planar actuator.

You might also be interested in these eBooks

Measurement Technology and Intelligent Instruments VIII

View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

195-198

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.195

Citation:

Cite this paper

Online since:

June 2008

Authors:

Yoshikazu Arai, S.Y. Dian, Wei Gao

Keywords:

Actuator, Disturbance, Modeling Uncertainty, Sliding Mode Observer (SMO), Ultra-Precision Positioning

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] W. Gao, S. Dejima, H. Yanai, K. Katakura, S. Kiyono and Y. Tomita: Precision Engineering, Vol. 28-3, (2004), 329-337.

DOI: 10.1016/j.precisioneng.2003.12.003

Google Scholar

[2] K. K. Tan, K. Z. Tan, H. F. Dou, S. N. Huang: Control Engineering Practice, Vol. 10, (2002), 757-772.

Google Scholar

[3] S. Dejima, W. Gao, K. Katakura, S. Kiyono and Y. Tomita: Precision Engineering, Vol. 29-3, (2005), 329-337.

Google Scholar

[4] C. Edwards, S. K. Spurgcon: Sliding mode control: Theory and Applications, Taylor & Francis, (1998).

Google Scholar

[5] A. S. I. Zinober: Deterministic control of uncertain system, Peter Reregrinus Ltd. 1990. 2. 6 2. 65 2. 7 2. 75 2. 8 2. 85 2. 9 2. 95 4. 97 4. 98 4. 99.

Google Scholar

[5] 5. 01 5. 02 5. 03 Input PID+SMO PID+DOB Time s Displacement µm 2. 6 2. 65 2. 7 2. 75 2. 8 2. 85 2. 9 2. 95 4. 97 4. 98 4. 99.

Google Scholar

[5] 5. 01 5. 02 5. 03 Input PID+SMO PID+DOB Time s Displacement µm (b) Positioning accuracy comparison.

Google Scholar

[2] 2. 05 2. 1 2. 15 2. 2.

Google Scholar

[1] [2] [3] [4] [5] [6] Input PID+SMO PID+DOB Time s Displacement µm.

Google Scholar

[2] 2. 05 2. 1 2. 15 2. 2.

Google Scholar

[1] [2] [3] [4] [5] [6] Input PID+SMO PID+DOB Time s Displacement µm (a) Result of step response experiment.

Google Scholar