Development of Ultra Precision Gear Measuring Instrument/UPGMI

Hiroomi Ogasawara; Noritsugu Maeda; Teru Hayashi

doi:10.4028/www.scientific.net/KEM.381-382.179

Paper Titles

Calibration Technology of the Articulated Arm Flexible CMM
p.161

Theory and Application Research of Dynamic Measuring Accuracy
p.165

Research on the Application Technology of Linear CCD in Dynamic Measuring Molten Tin Glass Surface
p.169

Online Measurement of Micro-Aspheric Surface Profile with Compensation of Scanning Error
p.175

Development of Ultra Precision Gear Measuring Instrument/UPGMI
p.179

Use of Air Beam for In-Process Optical Measurement in Precision Machining
p.183

Development and Evaluation of a Non-Contact On-Machine Profile Measurement System Using a Compact Laser Probe
p.187

Measurement Method for Micro-Cavity Based on Improved MAP Algorithm
p.191

A Novel Control Method Using Nonlinear Observer for a XYθ_z Planar Actuator
p.195

HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382Development of Ultra Precision Gear Measuring...

Development of Ultra Precision Gear Measuring Instrument/UPGMI

Abstract:

The object of this paper is to describe the process and current status of the development project of an Ultra Precision Gear Measuring Instrument that guarantees a measurement accuracy that falls into a submicron range. The angular indexing mechanism, which is the basis of its measurement accuracy, consists of a purely mechanical system. The system is based on the concept of accuracy feedback where its own deviation estimated from measurement results is fed back into the finishing process. It consists of basic axes with minimum error causing factors in order to seek the optimum accuracy that can be achieved by precision machinery. The measurement accuracy of this measuring instrument has already reached the submicron range in its initial assembly state.