Online Measurement of Micro-Aspheric Surface Profile with Compensation of Scanning Error
A novel scanning probe measurement system has been developed to achieve precise profile measurements of micro-aspheric surfaces. The system consists of a scanning stage (a spindle and a linear slide) and a sensor unit. The sensor unit consists of a ring artifact, two capacitance sensors and a contact-mode displacement sensor. The two capacitance sensors scan the surface of the ring artifact to measure and compensate the error motions of the scanning stage while the contact-mode displacement sensor scans the surface of a micro-aspheric. In this paper, a new contact-mode displacement sensor that has a small contact force of less than 2.3 mN and a stable output has been developed. After investigating the fundamental performance of the contact-mode displacement sensor, the sensor has been applied to the micro-aspheric surface profile measurement system. The effectiveness of the measurement system has been verified by the measurement results.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Y. Arai et al., "Online Measurement of Micro-Aspheric Surface Profile with Compensation of Scanning Error", Key Engineering Materials, Vols. 381-382, pp. 175-178, 2008