Online Measurement of Micro-Aspheric Surface Profile with Compensation of Scanning Error

Abstract:

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A novel scanning probe measurement system has been developed to achieve precise profile measurements of micro-aspheric surfaces. The system consists of a scanning stage (a spindle and a linear slide) and a sensor unit. The sensor unit consists of a ring artifact, two capacitance sensors and a contact-mode displacement sensor. The two capacitance sensors scan the surface of the ring artifact to measure and compensate the error motions of the scanning stage while the contact-mode displacement sensor scans the surface of a micro-aspheric. In this paper, a new contact-mode displacement sensor that has a small contact force of less than 2.3 mN and a stable output has been developed. After investigating the fundamental performance of the contact-mode displacement sensor, the sensor has been applied to the micro-aspheric surface profile measurement system. The effectiveness of the measurement system has been verified by the measurement results.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

175-178

DOI:

10.4028/www.scientific.net/KEM.381-382.175

Citation:

Y. Arai et al., "Online Measurement of Micro-Aspheric Surface Profile with Compensation of Scanning Error", Key Engineering Materials, Vols. 381-382, pp. 175-178, 2008

Online since:

June 2008

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Price:

$35.00

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