Eliminate of the Nonlinearity in Heterodyne Interferometer

Abstract:

Article Preview

A new approach is found to eliminate the nonlinearity of heterodyne interferometer. It uses a simple phase compensation system by rotating a polarizer which is set up before the detector in the interferometer. This method can be used in most science researches and the industry precision nanometer measurement, and it is valid for all nonlinearity errors whether it is a first-order or a higher-order error, or caused by any reasons.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

255-258

DOI:

10.4028/www.scientific.net/KEM.381-382.255

Citation:

W. M. Hou et al., "Eliminate of the Nonlinearity in Heterodyne Interferometer", Key Engineering Materials, Vols. 381-382, pp. 255-258, 2008

Online since:

June 2008

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.