Eliminate of the Nonlinearity in Heterodyne Interferometer
A new approach is found to eliminate the nonlinearity of heterodyne interferometer. It uses a simple phase compensation system by rotating a polarizer which is set up before the detector in the interferometer. This method can be used in most science researches and the industry precision nanometer measurement, and it is valid for all nonlinearity errors whether it is a first-order or a higher-order error, or caused by any reasons.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
W. M. Hou et al., "Eliminate of the Nonlinearity in Heterodyne Interferometer", Key Engineering Materials, Vols. 381-382, pp. 255-258, 2008