3D Displacement Measurement with Pico-Meter Resolution Using Single Heterodyne Grating Interferometry

Abstract:

The precision positioning device becomes significant requirement in scientific instruments used for the applications of nanotechnology for a few decades. To achieve the high resolution positioning, the sensing methods of displacement sensor become more important in positioning device. In this paper, a novel method is presented for measuring both in-plane/out-plane displacements with the single heterodyne grating interferometry (HGI). We demonstrated the 1D, 2D, and 3D measurement results respectively and the smallest displacement can be detected was better than 6 pm. Furthermore, the nanometer resolution can be ensured within 20 µm displacement. Hence, the in-plane/out-plane measurements with single apparatus can be realized by our method and might be a displacement sensor using in the motorized stage with suitable opto-mechanics structure minimization.

• Periodical: Key Engineering Materials (Volumes 381-382)
• Pages: 283-286
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.381-382.283
• Online since: June 2008
• Authors: Cheng Chih Hsu, Ju Yi Lee, C.C. Wu, H.C. Shih
• Keywords: Diffracted Grating, Heterodyne Interferometry, Pico-Meter Resolution, Precision Metrology, Three-Dimensional

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