Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images

Y. Li; Li Jiang Zeng

doi:10.4028/www.scientific.net/KEM.381-382.299

Paper Titles

3D Displacement Measurement with Pico-Meter Resolution Using Single Heterodyne Grating Interferometry
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Merging Phase Shifting Interferometry with Confocal Chromatic Microscopy
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Positional Detection in Grating Mosaic Based on Image Processing of Far-Field Diffraction Intensity Patterns in Two Wavelengths
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A Comparison of Image Registration Methods Used for Printed Circuit Board Inspection
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Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images
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Machine Vision Based Tracking Control of a Ball-Beam System
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A Point Matching Method for Stereovision Measurement
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Photogrammetric Measurement of Deformation of Large Deployable Mesh Microwave Antenna
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Photogrammetric Method with Distance Constraint for Profile of Inflatable Space Antenna
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382Analyzing the Grating Profile Parameters Based on...

Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images

Abstract:

Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.