Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images

Abstract:

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Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

299-300

DOI:

10.4028/www.scientific.net/KEM.381-382.299

Citation:

Y. Li and L. J. Zeng, "Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images", Key Engineering Materials, Vols. 381-382, pp. 299-300, 2008

Online since:

June 2008

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Price:

$35.00

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