Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images
Measuring grating profiles is very helpful for the analysis of specifications of gratings and improvement of grating fabrication techniques. We analyzed grating grooves by digitizing the scanning-electron microscope (SEM) images. Some kinds of filter and arithmetic were developed to extract the contour line of grating profile. In order to analyze the diffraction efficiency affected by the shape of grating profile, the calculated diffraction efficiency based on the SEM image and measured diffraction efficiency based on experiment was compared and analyzed.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Y. Li and L. J. Zeng, "Analyzing the Grating Profile Parameters Based on Scanning-Electron Microscope Images", Key Engineering Materials, Vols. 381-382, pp. 299-300, 2008