Performance Evaluation of Ultra-Precision Motion Controlled Positioning Stage
This abstract presents the development of an ultra-precision motion controlled positioning stage for nanometer positioning over a working volume of 50 mm × 50 mm × 4 µm at an accuracy of better than 10 nm that is traceable to the national standards. The positioning stage is designed to use various probing systems to perform “pick and place” manipulations and scanning of large specimens, including biological. The system is comprised of a two-axis, long-range stage and a 6 degree-of-freedom (DOF) short-range stage. The long-range stage is responsible for coarse motions of up to 50 mm, while the short-range stage is responsible for correcting positioning errors generated by the long-range stage to achieve nanometer level accuracies. The system will be housed in a vacuum chamber operating at a vacuum pressure of better than 10-3 Torr. The vacuum chamber is also designed to act as an environmental chamber where different gases can be used depending on the measurement task. The initial results of the fully developed positioning stage will be presented at the conference.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
E. S. Buice et al., "Performance Evaluation of Ultra-Precision Motion Controlled Positioning Stage", Key Engineering Materials, Vols. 381-382, pp. 497-500, 2008