A Planar Capacitive Sensor for Large Scale Measurement
A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
W. Wang et al., "A Planar Capacitive Sensor for Large Scale Measurement", Key Engineering Materials, Vols. 381-382, pp. 509-512, 2008