A Planar Capacitive Sensor for Large Scale Measurement

Wen Wang; X.X. Li; Zi Chen Chen

doi:10.4028/www.scientific.net/KEM.381-382.509

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382A Planar Capacitive Sensor for Large Scale...

A Planar Capacitive Sensor for Large Scale Measurement

Abstract:

A planar capacitive sensor (PCS) is proposed for X and Y directions measurement. One axial displacement can be measured without the coupling of another axial movement. Two groups electrodes with 90 degree out-of-phase, forming triangle sine and triangle cosine wave, can be applied for direction detection and interpolation, aiming at high resolution. Simulation results show that proposed PCS is available for planar measurement.

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Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

509-512

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.509

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Online since:

June 2008

Authors:

Wen Wang, X.X. Li, Zi Chen Chen

Keywords:

Large Scale, Planar Capacitive Sensor, Precision Measurement

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