Self-Mixing Interferometer Based on Four-Bucket Integration Technique for Micro-Displacement Measurement

Dong Mei Guo; Ming Wang

doi:10.4028/www.scientific.net/KEM.381-382.53

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382Self-Mixing Interferometer Based on Four-Bucket...

Self-Mixing Interferometer Based on Four-Bucket Integration Technique for Micro-Displacement Measurement

Abstract:

A novel self-mixing interference signal analysis method is proposed based on the use of an electro-optic modulator (EOM). Self-mixing interference occurs in the laser cavity by reflecting the light from a mirror-like target in front of the laser. Sinusoidal phase modulation of the beam is obtained by an EOM in the external cavity. The phase of the interference signal is calculated by four-bucket integration technique. The interferometer is applied to measure the displacement of a high-precision commercial PZT with an accuracy of a few nanometers.

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Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

53-56

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.53

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Online since:

June 2008

Authors:

Dong Mei Guo, Ming Wang

Keywords:

Displacement Measurement, Self-Mixing Interferometer, Sinusoidal Phase Modulation

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