Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range

D.H. Jeong; Hyun Kyu Kweon; Y.S. Kim

doi:10.4028/www.scientific.net/KEM.381-382.47

Paper Titles

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AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces
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Compact Displacement Measurement System Based on Microchip Nd:YAG Laser with Birefringence External Cavity
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New Synthetic Heterodyne Laser Doppler Vibrometer for Measurement of Mechanical Vibrations with Submicron Amplitude
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Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range
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Quasi-Common-Path Laser Feedback Interferometers for Precision Measurement of Non-Cooperative Targets
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Self-Mixing Interferometer Based on Four-Bucket Integration Technique for Micro-Displacement Measurement
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Micro-Nanometer Positioning Control of Bimodal Ultrasonic Motor Based on Wavelet Differential Actuation Pattern
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Adaptive Fiber-Optical Sensor System for Pico-Strain and Nano-Displacement Metrology
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382Development of the Precision Stage with Nanometer...

Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range

Abstract:

Most of the nano-positioning systems(stage) are accomplished by a flexure hinge mechanism, which is two or three multilayer PZT actuators to realize the high accuracy and long range[1]. In this paper, it can be made by a new nano stage with the bending characteristics of the mechanical cantilever that is composed of the step motor, one multilayer PZT actuator and the displacement sensor unit. The sensor unit consists of semiconductor LD, PD and sensor holder. The displacement of stage is acquired by the bending control of the cantilever between the step motor and the PZT actuator. The basic properties of the positioning stage are presented. From these results, we can know that the new nano stage can be made by only one multilayer PZT actuator .