AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces

Abstract:

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In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

35-38

DOI:

10.4028/www.scientific.net/KEM.381-382.35

Citation:

Y. G. Cui et al., "AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces", Key Engineering Materials, Vols. 381-382, pp. 35-38, 2008

Online since:

June 2008

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Price:

$35.00

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