AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces
In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
Y. G. Cui et al., "AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces", Key Engineering Materials, Vols. 381-382, pp. 35-38, 2008