AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces

Yu Guo Cui; Bing Feng Ju; J. Aoki; Yoshikazu Arai; Wei Gao

doi:10.4028/www.scientific.net/KEM.381-382.35

Paper Titles

The Assessment of Functional Properties of Surfaces with Morphological Operations
p.19

Tactile and Optical Microsensors - Test Procedures and Standards
p.23

Simulation of Light Scattering from Nanostructured Surfaces
p.27

Characterization and Manipulation of Boron Nanowire inside SEM
p.31

AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces
p.35

Compact Displacement Measurement System Based on Microchip Nd:YAG Laser with Birefringence External Cavity
p.39

New Synthetic Heterodyne Laser Doppler Vibrometer for Measurement of Mechanical Vibrations with Submicron Amplitude
p.43

Development of the Precision Stage with Nanometer Accuracy and a Millimeter Dynamic Range
p.47

Quasi-Common-Path Laser Feedback Interferometers for Precision Measurement of Non-Cooperative Targets
p.49

HomeKey Engineering MaterialsKey Engineering Materials Vols. 381-382AFM with the Slope Compensation Technique for...

AFM with the Slope Compensation Technique for High-Speed Precision Measurement of Micro-Structured Surfaces

Abstract:

In this paper, we applied the contact constant-height mode together with the pre-compensation technique which can realize the capability of high speed as well as faithful topographical image. Before scanning, the slope variation of the micro-structured surface was measured by the capacitance sensor and then stored in a PC. During the surface profile scanning, a piezoelectric actuator is applied which can provide the inconsecutive motion that corresponds to the pre-measured slope variation. As a result, the precision measurement can also be achieved. The validity of the proposed method and its performance are verified by compare the topographical images that were gained by the contact constant-force mode with feedback control. However, the scanning speed of our method is obviously high.

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Periodical:

Key Engineering Materials (Volumes 381-382)

Pages:

35-38

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.381-382.35

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Online since:

June 2008

Authors:

Yu Guo Cui, Bing Feng Ju, J. Aoki, Yoshikazu Arai, Wei Gao

Keywords:

Atomic Force Microscope (AFM), Constant-Height Mode Scan, Micro Metrology, Microstructure, Nano Metrology, Slope Compensation

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