Tactile and Optical Microsensors - Test Procedures and Standards

Abstract:

This paper presents procedures and standards to test tactile and optical microsensors and micro-computed tomography (CT) systems. The tests are similar to the established tests for classical coordinate measuring machines and assess local and global sensor characteristics. For this purpose, adequate and miniaturized reference standards were manufactured, calibrated and tested. In addition, task-specific reference standards have been realized to determine special sensor characteristics such as the maximum slope angle measurable by optical sensors or specific errors of tactile-optical microprobes measuring deep microholes.

• Periodical: Key Engineering Materials (Volumes 381-382)
• Pages: 23-26
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.381-382.23
• Online since: June 2008
• Authors: Ulrich Neuschaefer-Rube, Michael Neugebauer, W. Ehrig, Markus Bartscher, U. Hilpert
• Keywords: Dimensional Measurement, Microsensors, Reference Standard, Test Procedure, Traceability

References

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DOI: 10.1016/s0007-8506(07)61707-7

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