Simulation of Light Scattering from Nanostructured Surfaces
This paper presents an efficient computation method to evaluate scattered light intensity distributions, generated by a nanostructured surface which is illuminated with a monochromatic laser beam of several millimeters in diameter. The new simulation approach based on a modified Huygens-Fresnel approximation enables to improve measuring methods without expensive and time consuming experiments. The qualitative verification of the model results in a roughness measuring principle based on double scattering of coherent light.
Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek
A. Tausendfreund et al., "Simulation of Light Scattering from Nanostructured Surfaces", Key Engineering Materials, Vols. 381-382, pp. 27-30, 2008