Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine

Abstract:

Article Preview

The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

565-568

DOI:

10.4028/www.scientific.net/KEM.381-382.565

Citation:

G. Jäger et al., "Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine", Key Engineering Materials, Vols. 381-382, pp. 565-568, 2008

Online since:

June 2008

Export:

Price:

$35.00

In order to see related information, you need to Login.

In order to see related information, you need to Login.