Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine

Abstract:

The today’s nanometrology limits the accuracy of the precision engineering. These limits are based on the meter definition as redefined in 1983. It is proposed to define precision mechatronics as the science and engineering of high level precision systems and machines. The paper describes a precision mechatronic machine. This device represents a long range positioning machine having a resolution of 0.1 nm over the range of 25 mm x 25 mm x 5 mm. The integration of several optical and tactile nanoprobes makes the 3D-nanopositioning suitable for various tasks. New developed nanoprobes (optical focus probe, nanoindenter, metrological scanning force microscope) and results of measurement will be presented.

• Periodical: Key Engineering Materials (Volumes 381-382)
• Pages: 565-568
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.381-382.565
• Online since: June 2008
• Authors: Gerd Jäger, E. Manske, T. Hausotte, R. Mastylo, N. Dorozhovets, N. Hofmann
• Keywords: Nano Metrology, Nanomeasuring Machine, Optical Nanoprobes, Tactile Nanoprobes

References

[1] Documents concerning the new definition of the meter, Metrologia 19, 163-177 (1984).

[2] T. J. Quin et al.: Metrologia 36 (3), 211-244 (1997).

[3] G. Jäger ; R. Grünwald; E. Manske; T. Hausotte; R. Füßl: Nanotechnology and Precision Engineering, Vol. 2, 81-84 (2004).

[4] G. Jäger; T. Hausotte; E. Manske; H. -J. Büchner; R. Mastylo; N. Dorozhovets; R. Füßl; R. Grünwald: Material Science Forum, Trans Tech Publications Switzerland; 7-12 (2006).

DOI: 10.4028/www.scientific.net/msf.505-507.7

[5] G. Jäger; E. Manske; N. Hofmann; N. Dorozhovets: SPIE Optics & Photonics, San Diego, USA, Proceedings, Vol. 5878 (2005).

[6] R. Mastylo; E. Manske; G. Jäger: OPTO Nürnberg, Proceedings, 123-126 (2004).

[7] N. Dorozhovets; T. Hausotte; N. Hofmann; E. Manske; G. Jäger: SPIE Optics & Photonics, San Diego, USA (2006).