Study on Scanning Squareness Measurement Method and Uncertainty Estimation

Xin Chen; Kiyoshi Takamasu

doi:10.4028/www.scientific.net/KEM.381-382.569

Paper Titles

Test Artefacts for the Verification of Optical Digitizers
p.553

Kalman Filter for Estimation of a Linear Regression Model with Account of the Regression Vector Error and its Application to Calibration of Measuring Instruments
p.557

Research on Specification Uncertainty in the Next Generation GPS
p.561

Traceable Nanometrology Realized by Means of Nanopositioning and Nanomeasuring Machine
p.565

Study on Scanning Squareness Measurement Method and Uncertainty Estimation
p.569

Improved Abbe Vertical Metroscope for the Calibration of Gauge Blocks
p.573

Analysis of Gear Measurement Using Virtual Gear Checker (VGC)
p.577

Industrial Robot Error Compensation Using Laser Tracker System
p.579

Research on Measurement Uncertainty Evaluation Methods Based on Bayesian Principle
p.583

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Study on Scanning Squareness Measurement Method and Uncertainty Estimation

Abstract:

This paper presents a scanning squareness measurement method for large ultra-precision components. A rectangular block as the squareness reference is used. The squareness error of the rectangular block is eliminated according to the geometric principle that the sum of four internal angles of a rectangle is 360°. And the straightness error of each line of the rectangular block is eliminated by means of scanning method with two 1D probes. The above two error separation technologies are combined effectively and the data processing method is developed. Additionally, the standard uncertainties including tilt and squareness errors of the rectangular block, temperature drift and random errors of the measured values of the probes are analyzed theoretically. It is confirmed that a combined standard uncertainty of less than 1 arcsec can be obtained for typical values of the parameters.