Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Abstract:

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An innovative two-dimensional (2D) grating was designed for precision pitch measurement using an atomic force microscope with laser interferometers (DLI-AFM). Two kinds of 2D gratings, cylindrical and octagonal pattern, were investigated and compared. In pitch analyses of these patterns, the latter octagonal pattern showed smaller fluctuation of pitch values, less than 0.1 nm. Therefore, one of the major uncertainty components, filtering parameter, was reduced dramatically. We propose the octagonal pattern is probably the most preferable pattern for accurate calibration on 2D gratings.

Info:

Periodical:

Key Engineering Materials (Volumes 381-382)

Edited by:

Wei Gao, Yasuhiro Takaya, Yongsheng Gao and Michael Krystek

Pages:

605-606

DOI:

10.4028/www.scientific.net/KEM.381-382.605

Citation:

K. Sugawara et al., "Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes ", Key Engineering Materials, Vols. 381-382, pp. 605-606, 2008

Online since:

June 2008

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Price:

$35.00

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