Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Kentaro Sugawara; Osamu Sato; K. Yoshizaki; Ichiko Misumi; S. Gonda

doi:10.4028/www.scientific.net/KEM.381-382.605

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Using of Validated Software for Uncertainty Analyses Tools in Accredited Laboratories
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Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes
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An Intelligent Design for Foot Orthoses
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Study on In-Process Detection and Diagnosis of Faults Arc Based on Early Sounds Signature and Intermittent Chaos
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Processing of Complex Modulated Ultrasonic Signals in Gas Flow Metering
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Investigation on the Noise Separation in Watt Balance Experiments
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Universal Designed Structures for Strict Pitch Measurements Using Scanning Probe Microscopes

Abstract:

An innovative two-dimensional (2D) grating was designed for precision pitch measurement using an atomic force microscope with laser interferometers (DLI-AFM). Two kinds of 2D gratings, cylindrical and octagonal pattern, were investigated and compared. In pitch analyses of these patterns, the latter octagonal pattern showed smaller fluctuation of pitch values, less than 0.1 nm. Therefore, one of the major uncertainty components, filtering parameter, was reduced dramatically. We propose the octagonal pattern is probably the most preferable pattern for accurate calibration on 2D gratings.