Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range

Hua Wei Chen; Ichiro Hagiwara

doi:10.4028/www.scientific.net/KEM.407-408.159

Paper Titles

Study on Machine Accuracy of the Serial-Parallel Machine Tool Based on the BP Neural Network
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Kinematics Simulation of a Tripod Parallel Universal Wrist
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Dimensional Designing Study on a Novel 3-RPS Parallel Machine
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Basic Study on the Development of the General Purpose Vertical Milling Machine for Educational Skill Training
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Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range
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The Study of Constant Grinding Removal Rate Model of Turning-Grinding Composite Machine Tool
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Research on the Integrated Design of Dual Mass Flywheel CAD/CAE/CAM
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Study of Virtual Numerical Control Milling Simulation System
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Construction of Lander Multidisciplinary Optimization Platform
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Novel Precision PZT-Driven Micropositioning Stage with Large Travel Range

Abstract:

One novel long-travel piezoelectric-driven linear micropositioning stage capable of moving in a stepping mode is developed. The stick-slip friction effect between flexure hinge actuation tips with a sliding stage is used to drive the stage step-by-step through an enlarged displacement of piezoelectric actuator. In order to enlarge the travel range, magnifying mechanism is optimally designed by use of flexure hinge and lever beam. Moreover, dynamic model of such stage is proposed by consideration of reset integrator stick-slip model. The simulation results show that the stage has considerable good dynamic properties.