The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine

Tong Xing; Hai Hui Zheng; Wei Li

doi:10.4028/www.scientific.net/KEM.416.154

Paper Titles

Research on Surface Roughness of Ultrasonic Polishing without Abrasive Based on Orthogonal Experiments
p.133

Research on the Correlation between the Surface Quality and the Abrasive Grains Wear in Dual-Lapping Process of Sapphire
p.137

Study on the Properties of New Ultrasonic Vibration Internal Grinding System
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The Key Technologies of Belt Grinding of Glass Fiber Reinforced Plastic Composite
p.149

The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine
p.154

Design of Ultrasonic Transformer Vibrated Radically with Double Supports in Gear Honing
p.159

Electroplating Nickel-Iron Alloy on the Diamond Surface
p.164

Study on Roundness Error Correction for the Ceramic Ball in Rotated Dual-Plates Lapping Process
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Research on the Mechanism and the Superficial Microstructure of the Nano-Composited Ceramics under Ultrasonic Polishing
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HomeKey Engineering MaterialsKey Engineering Materials Vol. 416The Modeling and Simulation of Pneumatic Loading...

The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine

Abstract:

Double-sided polishing machine is widely used to high precision dimension, high accuracy surface, and ultra-smooth surface without damage layer for some hard and brittle workpiece such as silicon wafer, sapphire, ceramic, magnetic substrates, electronic materials, etc. Pneumatic loading system is the very crucial part of the double-sided polishing machine. The polishing machine’s performances are directly determined by the loading precision. This paper establishes the modeling and simulation of pneumatic load system by AMESim and then gives optimization parameters to improve system performance, and the cure of load capacity is given.

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Periodical:

Key Engineering Materials (Volume 416)

Pages:

154-158

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.416.154

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Online since:

September 2009

Authors:

Tong Xing, Hai Hui Zheng, Wei Li

Keywords:

AMEsim, Double Sided Polishing Machine, Pneumatic Loading, Polishing Pressure

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References

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