The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine
Double-sided polishing machine is widely used to high precision dimension, high accuracy surface, and ultra-smooth surface without damage layer for some hard and brittle workpiece such as silicon wafer, sapphire, ceramic, magnetic substrates, electronic materials, etc. Pneumatic loading system is the very crucial part of the double-sided polishing machine. The polishing machine’s performances are directly determined by the loading precision. This paper establishes the modeling and simulation of pneumatic load system by AMESim and then gives optimization parameters to improve system performance, and the cure of load capacity is given.
Bo Zhao, Xipeng Xu, Guangqi Cai and Renke Kang
T. Xing et al., "The Modeling and Simulation of Pneumatic Loading System of Double-Sided Polishing Machine", Key Engineering Materials, Vol. 416, pp. 154-158, 2009