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Millimeter Wave Sintering of AlN Ceramics for Heat Sink Application
Abstract:
By using 24 GHz millimeter-wave irradiation, full densification of AlN added with Y2O3 was attained at 1700 °C, which is comparable to 28GHz-wave irradiation. Thermal conductivity of a resultant sample exceeded 200 W/mK, which is the highest value in AlN fabricated in non-reducing atmosphere.
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533-536
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December 2009
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© 2010 Trans Tech Publications Ltd. All Rights Reserved
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