Stress in Freestanding CVD Diamond Thick Film

Wen Zhuang Lu; Jia Jing Yuan; Dun Wen Zuo; Feng Xu; Yu Li Sun

doi:10.4028/www.scientific.net/KEM.426-427.564

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HomeKey Engineering MaterialsKey Engineering Materials Vols. 426-427Stress in Freestanding CVD Diamond Thick Film

Stress in Freestanding CVD Diamond Thick Film

Abstract:

The present paper describes research on stress in freestanding diamond thick film, diameter of 60mm, prepared on Mo substrate by DC arc plasma jet chemical vapor deposition (DCPCVD) method. The stress in the CVD diamond film was investigated by X-ray diffraction and Raman spectrum. The results show that the stress in the film is compressive. The stress changes little at the same homocentric round. The compressive stress along radial direction is that the stress in the centre of the film is lower than that in the edge at both the final surface and the original surface.

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Key Engineering Materials (Volumes 426-427)

Pages:

564-567

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.426-427.564

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Online since:

January 2010

Authors:

Wen Zhuang Lu, Jia Jing Yuan, Dun Wen Zuo, Feng Xu, Yu Li Sun

Keywords:

Diamond Film, Free-Standing, Large Area, Stress

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References

[1] W.Z. Lu, D. Zuo, M. Wang: J. of China Mechanical Engineering Vol. 15 (2004) No. 18, p.1676.

Google Scholar

[2] W.Z. Lu, D. Zuo, M. Wang, et al.: J. of Nanjing University of Aeronautics and Astronautics Vol. 36 (2004) No. 4, p.462.

Google Scholar

[3] L.Y. Liu, S.L. Chai, J.J. Mao: J. of Winged Missiles Vol. 1(2001), p.57.

Google Scholar

[4] K.V. Ravi: J. of Spacecraft and Rockets Vol. 30(1993), p.79.

Google Scholar

[5] Q. Zhao, Y.M. Lei, F.S. Li: J. of Infrared and Laser Engineering Vol. 2(1993), p.11.

Google Scholar

[6] F. Xu, D. Zuo, M. Wang: J. of Nanjing University of Aeronautics and Astronautics, Vol. 33 (2004) No. 6, p.436.

Google Scholar

[7] J.W. Steeds, A.E. Mora, S.J. Charles, et al: J. of Mat. Che. and Phy. Vol. 81 (2003)No. 2-3, p.281.

Google Scholar

[8] V.G. Ralchenko A.A. Smolin V.G. Pereverzev, et al.: J. of Diamond and Related Materials Vol. 4 (1995) No. 5-6, p.754.

Google Scholar

[9] M. Wieligor, T.W. Zerda: J. of Diamond and Related Materials Vol. 17 (2008)No. 1, p.84.

Google Scholar

[10] C.C. Chiu, Y. Liou, Y. Der Juang: J. of Thin Solid Film Vol. 260(1995), p.118.

Google Scholar

[11] J. Michler, M. Mermoux, Y. von Kaenel, et al: J. of Thin Solid Film Vol. 357(1999), p.189.

Google Scholar

[12] W.Z. Lu,D.W. Zuo,F. Xu, et al. : Bulletin of the Chinese Ceramic Society Vol. 27 (2008)No. 5, p.1010.

Google Scholar