Research on Quantum State in Fabricating Poly-Si Films


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Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.



Key Engineering Materials (Volumes 428-429)

Edited by:

Yuan Ming Huang




R. M. Jin et al., "Research on Quantum State in Fabricating Poly-Si Films", Key Engineering Materials, Vols. 428-429, pp. 540-543, 2010

Online since:

January 2010




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