Research on Quantum State in Fabricating Poly-Si Films
Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.
Yuan Ming Huang
R. M. Jin et al., "Research on Quantum State in Fabricating Poly-Si Films", Key Engineering Materials, Vols. 428-429, pp. 540-543, 2010