Research on Quantum State in Fabricating Poly-Si Films

Abstract:

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Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.

Info:

Periodical:

Key Engineering Materials (Volumes 428-429)

Edited by:

Yuan Ming Huang

Pages:

540-543

DOI:

10.4028/www.scientific.net/KEM.428-429.540

Citation:

R. M. Jin et al., "Research on Quantum State in Fabricating Poly-Si Films", Key Engineering Materials, Vols. 428-429, pp. 540-543, 2010

Online since:

January 2010

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Price:

$35.00

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