Research on Quantum State in Fabricating Poly-Si Films

Rui Min Jin; Lan Li Chen; Peng Hui Luo; Xin Feng Guo; Jing Xiao Lu

doi:10.4028/www.scientific.net/KEM.428-429.540

Paper Titles

Study on Polyurethane/Polyurethane Emulsion Water-Based Ink
p.524

Characteristics of Networked Manufacturing Resources
p.528

Synthesis and Magnetic Properties of Water-Based Fe₃O₄ Ferrofluid
p.533

FeSiB Annealing Technology Based on Amorphous Ribbons of the Linear Expansion Coefficient
p.537

Research on Quantum State in Fabricating Poly-Si Films
p.540

Microstructures of Strontium Aluminates and Polystyrene Phosphorescent Composite Films
p.544

Size-Dependent Conductivity of Polypyrrole Doped with Anthraquinone-2-Sulfonic Acid Sodium
p.548

Preparation and Properties of PZN-PZT/PVDF Piezoelectric Composites Modified by Graphite
p.552

Design of Signal Conditioning Module of PT100 Temperature Sensor Detection System
p.556

HomeKey Engineering MaterialsKey Engineering Materials Vols. 428-429Research on Quantum State in Fabricating Poly-Si...

Research on Quantum State in Fabricating Poly-Si Films

Abstract:

Amorphous silicon films prepared by PECVD on glass substrate have been crystallized by rapid thermal annealing (RTA). By means of micro-Raman scattering and scanning electronic microscope (SEM), the quantum states in these processions are found and discussed.