Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes

Abstract:

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In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1~2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4μm), the elastic constant and the natural frequency of the NCD coated probes were increased by 96%~107% and 28%~30% respectively, compared with the silicon probes.

Info:

Periodical:

Key Engineering Materials (Volumes 431-432)

Edited by:

Yingxue Yao, Dunwen Zuo and Xipeng Xu

Pages:

491-494

DOI:

10.4028/www.scientific.net/KEM.431-432.491

Citation:

Y. Jiang et al., "Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes", Key Engineering Materials, Vols. 431-432, pp. 491-494, 2010

Online since:

March 2010

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Price:

$35.00

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