Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes
In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1～2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4μm), the elastic constant and the natural frequency of the NCD coated probes were increased by 96%～107% and 28%～30% respectively, compared with the silicon probes.
Yingxue Yao, Dunwen Zuo and Xipeng Xu
Y. Jiang et al., "Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes", Key Engineering Materials, Vols. 431-432, pp. 491-494, 2010