Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes

Yan Jiang; Xiang Feng Li; Dun Wen Zuo; Jia Jing Yuan

doi:10.4028/www.scientific.net/KEM.431-432.491

Paper Titles

Comprehensive Evaluation Analysis and Optimization Methodology of Tool Geometric Parameters for High Speed Cutting
p.474

Experimental Study on Chip Shape and Tool Wear of High-Speed and Micro-Feed Cutting
p.479

Research on Particle Characteristics of Cellulosine Used in Generation Basing on Two-Phase Flow of the Gas and Solid
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3D FEM Simulation and Experimental Research of Springback in Bending Process of Aluminum Alloy Sheet
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Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes
p.491

An Adaptive Random-Period Interpolator for Stepping Motor Systems
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Study on Deposition of NCD on AFM Probe
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Aircraft Assembly Simulation Path Planning Based on Engineering Semantics
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Experimental Research of YAG Laser Cutting Soda-Lime Glass Sheets with Controlled Fracture
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Simulation Research on Elastic Constant and Natural Frequency of NCD Coated AFM Probes

Abstract:

In this work, the elastic constant and natural frequency of NCD and non-NCD coated AFM probes were simulated using ANSYS. The results indicated that after depositing 1～2μm thick NCD films on the silicon probes, the elastic constant and natural frequency were both increased, yet within the prescribed limit: when the cantilevers had the same total thicknesses (3μm, 3.5μm and 4μm), the elastic constant and the natural frequency of the NCD coated probes were increased by 96%～107% and 28%～30% respectively, compared with the silicon probes.