W Gradedly-Doped Diamond-Like Carbon Thin Films

Cheng Biao Wang; Zhi Jian Peng; Su Dong Wu; Zhi Qiang Fu; Xin Chun Chen

doi:10.4028/www.scientific.net/KEM.434-435.739

Paper Titles

Synthesis and Impedance Spectroscopy of Ga-Doped La_9.33(SiO₄)₆O₂ Apatite Oxide Ion Conductor
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Preparation and Electrochemical Performance of Hydrogen Electrode and Electrolyte for SOEC by Tape Casting and Lamination
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Ni/SDC Materials for Solid Oxide Fuel Cell Anode Applications by the Glycine-Nitrate Method
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Fabrication of YSZ Film by Aqueous Tape Casting Using PVA-B1070 Cobinder for IT-SOFC
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W Gradedly-Doped Diamond-Like Carbon Thin Films
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Effect of Al₂O₃ Xerogel on the Microstructure and the Properties of Laser Cladding Coating of Fe-Based Alloy
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Resonance Properties of a Functionally Gradient Piezoelectric Actuator Based on PNN-PZ-PT Ceramics
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Novel Fabrication Method of FGM Containing Nano-Particles - Centrifugal Mixed-Powder Method -
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Fabrication of Tailored Powder Structures by Electrophoretic Deposition and Sintering
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HomeKey Engineering MaterialsKey Engineering Materials Vols. 434-435W Gradedly-Doped Diamond-Like Carbon Thin Films

W Gradedly-Doped Diamond-Like Carbon Thin Films

Abstract:

W gradedly-doped diamond-like carbon films were deposited on silicon and stainless steel by a hybrid technique combining ion beam deposition with magnetron sputtering. The structure, mechanical performance, friction coefficient, and wear loss were investigated. With increasing W target current applied, the structure of the as-prepared films changed from amorphous DLC to a composite of metal-containing DLC and metal carbides; the content of sp3 structure decreased from 31.26% to 22.3%; the nanohardness increased from 12 GPa to 28 GPa; the elastic modulus increased from 170 GPa to 310 GPa; and the critical loads were in the range of 80~100 N. The comprehensive tribological property of the as-prepared samples was improved after W doping.