Application of Diode Lasers in Interferometrical Length Measurements

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Abstract:

The experimental results for the determination of the form of thin cylinders (Ø ~ 2.5 mm) as well as step heights of gauge blocks (~ 100 µm) and roundness profiles of test samples from metal or glass with different diameters between ~ 2.5 mm and 80 mm using two multi-wavelength diode laser interferometers are presented and discussed.

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423-427

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May 2010

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© 2010 Trans Tech Publications Ltd. All Rights Reserved

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[1] A. Abou-Zeid: Diode Lasers for Interferometry. J. of Prec. Engineering. 11(3) (1988), p.139.

Google Scholar

[2] J.J. Maki, N.S. Cambell, C.M. Grande, R.P. Knorpp, D.H. McIntyre: Stabilized diode-laser system with grating feedback and frequency-offset locking. Opt. Comm. 102 (1993), p.251.

DOI: 10.1016/0030-4018(93)90391-h

Google Scholar

[3] J.C. Camparo: Contemp. Phys. 26 (1985), p.443.

Google Scholar

[4] A. Abou-Zeid, N. Bader, G. Prellinger: Rb-stabilized Diode Laser for Dim. Metrology. Ultra Precision in Manufacturing Engineering, Franz Rhiem Verlag, Duisburg, 283 (1994).

Google Scholar

[5] A. Zarka, A. Abou-Zeid, et al: International Comparison of Eight Semiconductor Lasers Stabilized on 127I2 at 633 nm. Metrologia. 37 (2000), 4, p.329.

DOI: 10.1088/0026-1394/37/4/11

Google Scholar

[6] A. Abou-Zeid, P. Wiese: Diodenlaser-Refraktometer für die interfeometrische Längenmeßtechnik. Technisches Messen. 65 (1998), p.91.

DOI: 10.1524/teme.1998.65.3.91

Google Scholar

[7] A. Abou-Zeid: Diode Lasers for Industrial Length Measurements. Progress in Precision Engineering. Springer Verlag, Berlin. 50 (1991).

DOI: 10.1007/978-3-642-84494-2_5

Google Scholar

[8] A. Abou-Zeid, H. Bechstein, C. Enghave: Real-time Position and Form Measurements on CMMs by Means of Multi-function Laser Interferometry Based on Laser Diodes. BCR Final Report, EUR 15939 EN, Brüssel (1994).

Google Scholar

[9] F. Imkenberg, A. Nicolaus, A. Abou-Zeid: Tunable 633 nm Diode Lasers and Application for Phase Stepping Interferometry, Proc. of the 1st Inter. Euspen Conference. Pat. McKeown a. o. (Ed. ), Bremen, Germany, 2 (1999), p.769.

Google Scholar

[10] A. Höink, K. Meiners-Hagen, O. Jusko, A. Abou-Zeid: Form measurement of small cylindrical objects using two-wavelength interferometry. 5th International Symposium on Instrumentation Science and Technology, Shenyang (Mukden), 15-18, September, 2008 Proc. SPIE. (2009, in print).

DOI: 10.1117/12.823464

Google Scholar

[11] M. Takeda, H. Ina, and S. Kobayashi: Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry. J. Opt. Soc. Am. 72 (1982), pp.156-160.

DOI: 10.1364/josa.72.000156

Google Scholar

[12] T. Kreis: Digital holographic interference-phase measurement using the Fourier-transform method. J. Opt. Soc. Am. A, Vol. 3 (June 1986), No. 6.

DOI: 10.1364/josaa.3.000847

Google Scholar

[13] K. Meiners-Hagen, V. Burgarth, A. Abou-Zeid: Profilometry with a multi-wavelength diode laser interferometer. Measurement Science and Technology. 15 (2004), pp.741-746.

DOI: 10.1088/0957-0233/15/4/018

Google Scholar

[14] V. Burgarth, K. Meiners-Hagen, A. Abou-Zeid: Roundness Measurements with a Diode Laser Interferometer. Technisches Messen. 71(6) (2004), pp.335-340.

DOI: 10.1524/teme.71.6.335.34193

Google Scholar