Fabrication and Molding Testing of the Blazed Gratings for Microoptics Applications

Abstract:

This paper presents the experimental investigation of the optimal hot embossing replication to prevent the nanoscale thermal deformation of microstructures replicated from the electroless Ni mold fabricated by the diamond tool-interfered scribing process. The fabricated microstructures have the blazed profile with a period of 2.0 ㎛ and a depth of 0.2 ㎛ and a thermoplastic material PMMA as the replica was used. The hot embossing molding was carried out under the several experimental conditions. In terms of a quality of surface smoothness, profile, sharp blaze edge, surface roughness, peak to valley Ry and optical performance of the replica, the PMMA microstructures replicated under the optimal conditions, were ideally identical with those in the mold in dimension, and it was found that the demolding temperature is the most important factor for replication. From optical testing, diffraction efficiency of the replica was measured, 87.6%, similar to that of the calculated value 89.6%, and the replica molded in other conditions showed the noticeable efficiency drop due to molding error.

• Periodical: Key Engineering Materials (Volumes 447-448)
• Pages: 396-400
• DOI: https://doi.org/10.4028/www.scientific.net/KEM.447-448.396
• Online since: September 2010
• Authors: Cha Bum Lee, Sun Kyu Lee
• Keywords: Diamond Scribing, Diffraction, Electroless Ni, Molding, Thermal Deformation

References

[1] Jae Young Joo, Chang Seog Kang, Soon Sub Park and Sun-Kyu Lee, Opt. Express, Vol. 17, Iss. 26, (2009) pp.23449-23458.

[2] Do-Kyun Woo, Kazuhiro Hane, Seong-Cheon Cho, Sun-Kyu Lee, J. Vac. Sci. Technol B, Vol. 27 (2008).

[3] Do-Kyun Woo, Kazuhiro Hane, Sun-Kyu Lee, Opt. Express, Vol. 16, Iss. 25, (2008) pp.21004-21011.

[4] M. Heckele, W. Bacher, K. D. Müller, Microsys. Technol. 4 (1998) 122-12.

[5] Yuhua Guo, Gang Liu, Yin Xiong and Yangchao Tian, J. Micromech. Microeng. 17 (2007) 9-19.

[6] M. Worgull, J. -F. Htu, K. K. Kabanemi, M. Heckele, Microsys. Technol. (2006) 12 947-952.

[7] ChaBum Lee, Kazuhiro Hane and SunKyu Lee, J. Micromech. Microeng. 18 (2008) 045014.

[8] http: /www. allied-material. co. jp.

[9] D. Dornfeld, S. Min, Y. Takeuchi, Annals of the CIRP Vol. 55/2/2006 745-768.

DOI: 10.1016/j.cirp.2006.10.006

[10] Jiwang Yan, Kouki Maekawa, Junichi Tamaki and T. Kuriyagawa, J. Micromech. Microeng. 15 (2005) 1925-(1931).

[11] M Milton C. Shaw, METAL CUTTING PRINCIPLES, CLARENDON PRESS, OXFORD 2Ed.

[12] http: /www. mikromaschinenbau. com/brudek/Brudek_cutting_forces_micro_machining. pdf.

[13] Yoshihiko Hirai, Satoshi Yoshida and Nobuyuki Takagi, J. Vac. Sci. Technol. B 21(6). 2003 2765-2770.

[14] M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. A. Vol. 3, No. 11. (1986) 1385-1392.

[15] ChaBum Lee, Kazuhiro Hane, WanSoo Kim, and Sun-Kyu Lee, Appl. Opt. Vol. 47, (2008) 3246-3253.

[16] M. G. Moharam, T. K. Gaylord, J. Opt. Soc. Am. 71, 811-818 (1981) 5137-5142.