Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision

Yan Bin Fan; Qing Hua Lu; Xian Min Zhang

doi:10.4028/www.scientific.net/KEM.455.76

Paper Titles

Method of Network Manufacturing Alliance Building Based on Service Resources Matching
p.52

Tool Cutting Edge Line Detection Based on Improved Hough Transform
p.59

Quality Control and Tracing System of Automotive Airbag Flexible Assembly Line
p.66

Thermomechanical Finite Element Simulation of Cutting Force and Temperature in Ultrasonic Aided Turning of Hardened Steel
p.72

Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision
p.76

Influence of Prestrain on Output Characteristic of Dielectric Elastomer Film Actuators
p.81

Research on Multi-Axis High Speed Machining Milling Force of Aeroengine Impeller
p.87

Conjugate Meshing Roller Chain for Timing Mechanism
p.92

Experimental Research on the System Performance in Near-Dry Deep Hole Drilling
p.98

HomeKey Engineering MaterialsKey Engineering Materials Vol. 455Micro-Displacement Measurement with High Accuracy...

Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision

Abstract:

The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental results show that this method can measure micro-displacement with nanometer accuracy.

You might also be interested in these eBooks

Manufacturing Automation Technology Development

View Preview

Info:

Periodical:

Key Engineering Materials (Volume 455)

Pages:

76-80

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.455.76

Citation:

Cite this paper

Online since:

December 2010

Authors:

Yan Bin Fan, Qing Hua Lu, Xian Min Zhang

Keywords:

Computer Microvision, High-Accuracy, Micro-Displacement Measurement

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] H. Wang, X.M. Zhang: Mechanism and Machine Theory, Vol. 43 (2008), pp.400-410.

Google Scholar

[2] H. Wang, X.M. Zhang: Chinese Journal of Mechanical Engineering, Vol. 44 (2008) No. 10, pp.177-181. (in Chinese).

Google Scholar

[3] L. Chassagne, M. Wakim, S. Xu, et al.: Meas. Sci. Technol, Vol. 18 (2007), pp.3267-3272.

Google Scholar

[4] D.M. Freeman, A.J. Aranyosi, et al: Solid State Sensor & Actuator Workshop. (SC: Hilton Head, 1998), pp.150-155.

Google Scholar

[5] C.Y. Jin, S.J. Jin, D.C. Li, et al: Journal of Optoelectronics·Laser, Vol. 18 (2007) No. 11, pp.1359-1362. (in Chinese).

Google Scholar

[6] Q.H. Lu, X.M. Zhang: Chinese Journal of Mechanical Engineering, Vol. 45 (2009) No. 2, pp.164-169. (in Chinese).

Google Scholar

[7] C. Q Davis, Measuring nanometer, three-dimensional motions with light microscopy (PhD., Massachusetts Institute of Technology, USA, 1997).

Google Scholar

[8] Q. Liao, Y. Zhou, L. Mi, et al.: Journal of Chongqing University (Natural Science Edition), vol. 25(2002) No. 6, pp.1-4. (in Chinese).

Google Scholar

[9] B. K. P Horn, B.G. Schunck: International Journal of Computer Vision, Vol. 2 (1988), pp.51-76.

Google Scholar

[10] http: /www. pi-china. cn/pdf/datasheet/F_140. pdf.

Google Scholar

[11] Q.H. Lu, X.M. Zhang: International Journal of Imaging Systems and Technology, Vol. 17 (2008), pp.333-340.

Google Scholar