Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision
The micro-motion stages are critically important in modern manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates micro-motion measurement algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, an algorithm for micro-motion measurement is proposed. Finally, the micro-displacement of the micro-motion stage is measured using the integrated approach. The maximal bias of this proposed combined approach reached 12.5 nm. Experimental results show that this method can measure micro-displacement with nanometer accuracy.
Bo Zhao, Guanglin Wang, Wei Ma, Zhibo Yang and Yanyan Yan
Y. B. Fan et al., "Micro-Displacement Measurement with High Accuracy for Micro-Motion Stage Based on Computer Microvision", Key Engineering Materials, Vol. 455, pp. 76-80, 2011