Study on the Luminescence and Reflection Spectra of Al2O3 Doped Er2O3 Films on Si Substrates
Amorphous Al2O3 doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron sputtering technique. Emission spectra exhibit a strong emission band around 410 nm and a series of emission band near 970, 980, 1018, 1042 and 1080nm. Ellipsometry measurements show that the refractive index of the ErAlO films in the region of 400～1000 nm is between 1.76-1.83. The reflectivity of the ErAlO on Si is much smaller than that of clean Si and pure Er2O3 films. All the results indicate that ErAlO could be a promising material for Si solar cells.
Y. Y. Zhu et al., "Study on the Luminescence and Reflection Spectra of Al2O3 Doped Er2O3 Films on Si Substrates", Key Engineering Materials, Vols. 474-476, pp. 345-348, 2011